Abstract

We investigate the acoustic behaviour of Micro-Electro-Mechanical-Systems (MEMS) with a focus on shutter devices. These shutter devices can be used for a new method of sound generation ­ which we call Advanced Digital Sound Reconstruction (ADSR) ­ where a redirection mechanism for [...]

Abstract

The development and optimization of Micro electro-mechanical systems (MEMS) devices, due to their small size scale, require testing and precise characterization. As an example, over etch, which is the deviation between the designed masks and the effective dimensions of the suspended [...]